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phys.org › Technology › EngineeringHow to make e-beam lithography more practical as a mass ...
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Research Laboratory of Electronics graduate students Vitor Manfrinato and Lin Lee Cheong, with the electron-beam lithography system they ...
Electron-beam lithography | MIT News
news.mit.edu
MIT researchers show how to make e-beam lithography, commonly used to prototype computer chips, more practical as a mass-production technique. June
Electron-beam lithography: an old dog with new tricks - Advanced...
www.advancedsciencenews.com
Technique finds new use in patterning polymers to control cells and proteins.
UW getting electron beam lithography system for nanotech research
news.wisc.edu
It is an example of the type of nanostructure that can be etched with the electron beam lithography system. Trevor Knapp/Eriksson Research ...
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