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News
TAB Event - "Watching and Observing" Exhibition
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Showing at Up Field Gallery. Following the last
Wipo Publishes Patent of Tokyo Electron for "Method for Forming...
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GENEVA, June Publication No. WO was published on June 4.Title of the invention:... | Article from US Fed News Service, Including US State News...
Network Profiles
LinkedIn: Yasushi Aiba | LinkedIn
Yasushi Aibaさんのプロフィールをチェックしましょう。LinkedInは、Yasushi Aibaさんのような方が活動する世界最大の ...
Interests
Yasushi Aiba - Patents
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... Aiba patents. Recent bibliographic sampling of Yasushi Aiba patents listed/ published in the public domain by the USPTO (USPTO Patent Application #,Title): ...
Business Profiles
patentbuddy: Yasushi Aiba
TOKYO ELECTRON LIMITED
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Yasushi Aiba's Inventor profile, Nirasaki, JP, Tokyo Electron Limited, 21 patents/applications from Jan 11, to May 26, 2016, 59 forward patent citations,...
Books & Literature
Official Gazette of the United States Patent and Trademark Office:...
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427– Claims US 6,387,445 B1 TUNGSTEN LAYER FORMING METHOD AND LAMINATE STRUCTURE OF TUNGSTEN LAYER Yasushi Aiba , Kofu , and Yukio Koike , Yamanashi ...
Related Documents
CiteSeerX
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1, Kazuo Minami, SouichiWatanabe, Yoshinori Kan, Yasushi Aiba, Akira Sugawara and Tsuguhiro Watanabe, “Absolute Instability of Low-Frequency ...
Publications
Mukōda kuniko o meguru 17 no monogatari (Buch, 2002) [WorldCat.org]
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Diesen Titel erhalten Sie in einer Bibliothek! Mukōda kuniko o meguru 17 no monogatari. [Yasushi Aiba;]
Yoshiyuki junnosuke o meguru 17 no monogatari (Buch, 2002)...
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Diesen Titel erhalten Sie in einer Bibliothek! Yoshiyuki junnosuke o meguru 17 no monogatari. [Yasushi Aiba;]
Reports & Statements
Kuniko Mukoda (向田邦子) Artigos.wiki
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6 days ago · ) ISBN Kazuko Mukoda " Kuniko Mukoda's Love Bun" (Shinchosha, 2002) ISBN Yasushi Aiba Composição "
Miscellaneous
Yasushi Aiba | LinkedIn
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View Yasushi Aiba’s professional profile on LinkedIn. LinkedIn is the world's largest business network, helping professionals like Yasushi Aiba discover inside ...
US B2 - Method of manufacturing a processing apparatus...
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Morio Kajiyama, Sakae Nakatsuka, Yasushi Aiba: Original Assignee: Hitachi Ltd., Tokyo Electron Limited: Export Citation: BiBTeX, EndNote, RefMan:
US B2 - Method for forming tungsten film at a surface of a...
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A tungsten film with a lower specific resistance and a lower fluorine concentration over its boundary with the base barrier layer, which adheres to the...
US A - Apparatus and method for preventing the premature...
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A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space...
Aiba - Patent applications
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Yasushi Aiba, Nirasaki City JP. Patent application number, Description, Published ... Yasushi Aiba, Nirasaki JP. Patent application number, Description ...
Aiba, JP - Patent applicationswww.patentsencyclopedia.com › inventor › aiba-jp-5
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Yasushi Aiba, Yamanashi-Ken JP. Patent application number, Description, Published ... Yasushi Aiba, Yamanashi JP. Patent application number, Description ...
Stereo-future.com - DOMAIN ERROR - Whois
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Stereo-future.com is registered since 11 March Stereo-future.com is owned by Yasushi Aiba (Personal). Stereo-future.com IP is Stereo-future.com is …
US A1 - Film forming method Google Patents
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A clamp mechanism holding an object W to be processed placed on a susceptor in a processing vessel for film formation which can be...
US A - Reaction chamber with controlled radiant energy heating...
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A reaction chamber for a controlled reaction on a reaction surface of a sample provides for controlled distribution of radiant energy over the reaction...
US A - Method and apparatus for protection of conductive...
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US *, 28 Nov 2006, 10 Dec 2009, Yasushi Aiba, Heat Processing Method and Heat Processing Apparatus. US *, 14 Sep 2009, 7 Jan 2010, Lam Research Corporation, Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof. US
ClaimParse | Patent
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Issue Date, October 18, Title, Tungsten Film Forming Method. Inventorship, Takanobu Hotta, Nirasaki (JP) Yasushi Aiba, Nirasaki (JP). Assignee, TOKYO ...
Heat Processing Method and Heat Processing Apparatus - Patent...
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Patent application title: Heat Processing Method and Heat Processing Apparatus Inventors: Yasushi Aiba (Yamanashi-Ken, JP) IPC8 Class: AF27B516FI
Tungsten Film Forming Method - Patent application
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· Patent application title: Tungsten Film Forming Method Inventors: Yasushi Akasaka (Nirasaki City, JP) Takanobu Hotta (Nirasaki City, JP) Yasushi Aiba ...
US A - Plasma processing apparatus Google Patents
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Generated heat is effectively dissipated to prevent thermal deformation of a gas ejector plate in a plasma processing apparatus which is capable of...
WO A1 - Tungsten layer forming method and laminate structure...
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... PCT/JP , PCT/JP , WO A1, WO A1, WO A1, WO A1, WO A1, WO-A , WO-A , WO A1, WO A1, WO A1, WO A1, WO A1. Inventors, Yasushi Aiba, ...
US A - Dual gas faceplate for a showerhead in a semiconductor...
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A faceplate for a showerhead of a semiconductor wafer processing system having a plurality of gas passageways to provide a plurality of gases to the...
US B1 - Metal oxide film formation method and apparatus...
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In a metal oxide film formation method, a source gas mixture of organic compound gases containing at least three metals, and an oxidation gas are...
US B1 - Tungsten layer forming method and laminate structure of...
patents.google.com
... US B1, US B1, US-B , US B1, US B1. Inventors, Yasushi Aiba, Yukio Koike. Original Assignee, Tokyo Electron ...
US B2 - Tungsten film forming method Google Patents
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In a tungsten film forming method, a substrate having a recess is provided in a processing chamber, and a first tungsten film is formed on the substrate...
WO A1 - Film forming equipment and film forming method...
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Inventors, Tatsuya Handa, Yasushi Aiba. Applicant, Tokyo Electron Limited. Export Citation, BiBTeX, EndNote, RefMan. Patent Citations (3), Classifications (13), ...
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